NanoMechanisms

ナノメカニズム

クインズゲートのナノメカニズムは、集積容量ポジションセンサを単一システムに組み込んだ、ピエゾドライブ、屈曲ガイドステージです。可動部は、単独または一体として動く3つの並進軸と、傾けることのできる角度軸からなっています。

これはナノメートル以下の分解能と再現性があり、使いやすく、生産ラインの環境に耐えられるよう頑丈にできています。ナノメカニズムは高分解能、精度、安定性および高速応答を必要とします。当社の技術は、モーションの閉ループ制御、精密なポジション・センサ、優れた機構デザインによって、これらの条件を満たしています。

  • NPS-X-15A

  • The NPS-X-15A has been specifically designed for high speed, ultra precision MR head and disk drive testing.
  • NPS-X-5A

  • The NPS-X-5A has been specifically designed for high speed, ultra precision MR head and disk drive testing.
  • NPS-XY-100A

  • The NPS-XY-100A is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is made of Super Invar and is capable of sub-nanometer resolution and reproducibility.
  • NPS-XY-100B

  • The NPS-XY-100B is a piezo scanned flexure guided stage with integrated capacitance position sensors. Made of Aluminum it is capable of sub-nanometer resolution and reproducibility.
  • NPS-XYZ-100A/15A

  • The NPS-XYZ-100A/15A option incorporates an integrated Z axis stage to provide a solid XYZ arrangement. This arrangement offers over 120 microns of closed loop travel in x and y with over 16 microns of closed loop travel in the z axis.
  • NPS-XYZ-100A/15H

  • The NPS-XYZ-100A/15H adds an integrated Z axis stage to the NPS-XY-100A whilst maintaining the 10mm clear aperture. The entire system is constructed from Super Invar. This arrangement offers over 120 microns of travel in x and y with over 16 microns travel in the z axis.
  • NPS-Z-15A

  • The NPS-Z-15A is a piezo-scanned flexure guided stage with integrated capacitance position sensors. It features a front reference surface to allow integration with the NPS-XY-100A providing three axis positioning control.
  • NPS-Z-15B

  • The NPS-Z-15B is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed to have extremely low angular deviation as it scans.
  • NPS-Z-15H

  • The NPS-Z-15H is a piezo scanned flexure guided stage with integrated capacitance position sensors. This stage has been specifically designed with a hollow core, ideal for carrying a sample tip or optical fiber into the heart of any high-resolution microscope system. It features a front reference surface to allow integration with the NPS-XY-100A providing three axis positioning control.
  • NPS-Z-15L

  • The NPS-Z-15L is a piezo scanned flexure guided stage with integrated capacitance position sensors. It is capable of sub-nanometer resolution and reproducibility. This stage has been designed for high stiffness to move large loads of up to 5KG.
  • NPS-Z-500A

  • The NPS-Z-500A is a nanopositioning stage with integrated capacitive position sensors for operation in closed loop. Making use of Queensgate’s Dual Sensor TechnologyTM, it has been specifically designed to deliver long displacement – up to 500μm linear motion in the vertical axis – with a step and settle time of less than 20ms.
  • OEM-X-10A

  • The OEM-X-10A has been specifically designed for high speed, ultra precision MR head and disk drive testing.
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